KEY FEATURES

• Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation.
• The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
• Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
• The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
• Superior specimen handling using a fully motorized compucentric stage
• VEGA3 microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDX, WDX and EBSD analysis.