VEGA3 - 3rd Generation of VEGA SEMs
VEGA3 is a thermionic emission SEM system that comes either with tungsten heated filament or lanthanum hexaboride (LaB6) as electron source.

VEGA3

PRODUCT BROCHURE

3rd Generation of VEGA SEMs brochure

Download VEGA3 Brochure!

PDF – 6.1 MB

KEY FEATURES

  • Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation.
  • The proprietary Intermediate Lens (IML) that works as an „Aperture Changer“ makes the exchange of the effective final aperture in an electromagnetic way
  • Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
  • The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
  • Superior specimen handling using a fully motorized compucentric stage
  • VEGA3 microscopes can be configured in 4 different chamber sizes: SB, LM, XM, and GM. These chambers are fitted with a variety of ports and designed with optimal geometry for EDX, WDX and EBSD analysis.

Specification

Electron Gun Tungsten heated cathode / optionally LaB6
Resolution
SE 3nm at 30keV / 2nm at 30keV
BSE 3.5nm at 30keV / 2.5nm at 30keV
Magnification 3x - 1,000,000x (SB), 2x - 1,000,000x (LM),
1x - 1,000,000x (XM/GM)
Accelerating Voltage 200eV to 30keV
Probe Current 1pA to 2μA
Image size 16,384 x 16,384 pixels

Application

Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

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