KEY FEATURES
Specification
Electron Gun | Tungsten heated cathode / optionally LaB6 |
---|---|
Resolution | |
SE | 3nm at 30keV / 2nm at 30keV |
BSE | 3.5nm at 30keV / 2.5nm at 30keV |
Magnification | 3x - 1,000,000x (SB), 2x - 1,000,000x (LM), 1x - 1,000,000x (XM/GM) |
Accelerating Voltage | 200eV to 30keV |
Probe Current | 1pA to 2μA |
Image size | 16,384 x 16,384 pixels |