KEY FEATURES

Triglav™ - newly designed UHR electron column

• TriLens™ - objective system: unique combination of three-lens objective and crossover-free beam path
• Advanced detection system with multiple SE and BSE detectors TriSE™ and TriBE™
• Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
• Electron beam currents up to 400 nA and rapid beam energy changes
• Triple BSE detection TriBE™ for angle-selective signal collection. The Mid-Angle BSE and In-Beam LE-BSE detectors are located inside the column and detect medium-angle and axial backscattered electrons, while the In-Chamber BSE Detector detects wide-angle electrons. Together, they deliver a variety of imaging contrasts and enable low-energy detection down to 200 eV.
• Triple SE detection TriSE™ to capture SE signal optimally in all working modes. The In-Beam SE detector inside the column enables detection of electrons at very short working distances. SE detector for beam deceleration mode gives ultimate resolution in BDM. The In-Chamber SE detector delivers superb topographic contrast.
• Beam Deceleration Technology (BDT) for excellent resolution at very low beam energies down to 50 eV (optional)