XEIA3

PRODUCT BROCHURE

XEIA3 brochure

Extraordinary ultra-high resolution imaging and extremely fast micromachining. Download XEIA3 brochure!

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KEY FEATURES

TriLens™ - objective system: unique combination of three-lens objective and crossover-free beam path
Advanced detection system with multiple SE and BSE detectors - TriSE™ and TriBE™
Triglav™ - Ultimate ultra-high resolution at low beam energy: 1 nm at 1 keV and 0.7 nm at 15 keV
Electron beam currents up to 400 nA and rapid beam energy changes
Optimised column geometry for accommodating large wafers up to 8” and 12”

Specification

Electron Optics
Electron Gun	High brightness Schottky emitter
Resolution
Standard mode In-Beam SE	0.7nmat15keV 1.4nmat1keV
Beam Deceleration Mode (Option)	1.0nm at 1 keV - SE (BDM)
Magnification at 30keV	4 x - 1,000,000 x
Probe Current	2 pA to 400 nA

Xe plasma ion source FIB column for achieving the most challenging large-scale milling tasks in unbeatable short times frames

50x faster than Ga LMIS FIBs.
Ion beam range current of 1 pA to 2 µA and resolution of < 25 nm
Newly developed high resolution Xe plasma FIB column (Optional) achieving resolution of < 15 nm for extended patterning capabilities
Large-mass xenon ions with larger FIB current range for ultra-fast sputtering even without gas-assisted enhancement
Significant reduction in ion implantation compared to Ga LMIS FIBs
Rocking Stage - An effective and optimised polishing strategy against curtaining effect

Ion Optics

Ion column	HR i-FIB	i-FIB
Ion Gun	Xe plasma ion source
Accelerating voltage	3kV to 30kV
Probe current	1 pA to 1 µA	1 pA to 2 µA
Resolution (at 30 keV)	< 15 nm	< 25 nm
Magnification	Minimum 150 × at coincidence point and 10 kV (corresponding to 1 mm field of view), maximum 1,000,000 ×
SEM-FIB coincidence at	WD 9 mm (FERA3) / WD 5 mm (XEIA3) for SEM – WD 12 mm for FIB
SEM-FIB angle	55°

Semiconductors & Microelectronics

Material Science

Life Sciences

Earth Sciences

XEIA3Extraordinary Ultra-High Resolution imaging and extremely powerful Xe plasma ion source FIB column